7 / 31
Page 23
Volume 4
December 10-12, 2018
Rome, Italy
Nano Research & Applications
ISSN: 2471-9838
Advanced Materials 2018
Nano Engineering 2018
JOINT EVENT
22
nd
International Conference on
Advanced Materials
and Simulation
&
22
nd
Edition of International Conference on
Nano Engineering &
Technology
N
i-Cr-Mn-Y-Cu resistive thin films were prepared on glass
and Al
2
O
3
substrates by DC magnetron co-sputtering from
targets of Ni-Cr-Mn-Y casting alloy and Cu metals. Electrical
properties and microstructures of Ni-Cr-Mn-Y-Cu films under
different proportion of elements and annealing temperatures
were investigated. The phase evolution, microstructural
and composition of Ni-Cr-Mn-Y-Cu resistive films were
characterized by X-ray diffraction (XRD), scanning electron
microscopy (SEM), transmission electron microscopy (TEM)
and Auger Electron Spectroscopy (AES). When the annealing
temperature was set to 350°C, the Ni-Cr-Mn-Y-Cu films with an
amorphous structure were observed. The Ni-Cr-Mn-Y films with
6.4% Cu addition annealed at 300°C which was exhibited the
resistivity 770-cm with +15 ppm/°C of temperature coefficient
of resistance (TCR).
Recent Publications
1. Jie-Ting Shang, Chih-Ming Chen, Ta-Chih Cheng
and Ying-Chieh Lee (2015) influences of annealing
temperature on microstructure and properties for
TiO2 films deposited by DC magnetron sputtering.
Japan Journal of Applied Physics 54(12):5501-6.
2. Wei-Ju Chen, Tung-Yueh Liu, Ho-Yun Lee and Ying-
Chieh Lee (2018) Ni-Cr-Mn-Y-Nb resistive thin film
prepared by co-sputtering. Materials Chemistry and
Physics 210:327-335.
3. Chein-Hui-Yang, Chih-Neng Yang and Ying-Chieh Lee
(2017) Surface roughness improvement of alumina
substrates coated using aluminum nitride sol gel.
Journal of Ceramic Processing Research 18(9):628-
633.
4. Cheng-Hsien-Lin, Ho-Yun Lee, Yaw-Teng Tseng and
Ying-Chieh Lee (2018) A Study on the Ni-Cr-Mn-Zr
thin film resistors prepared using the magnetron
sputtering technique. Thin Solid Film DOI: 10.1016/j.
tsf.2018.04.015.
5. Ming-Yuan-Yeh, Pin-Yung Lee, Jie-Ting Shang
and Ying-Chieh Lee () The effect of thermal
oxidation temperatures on the phase evolution and
photocatalytic property of tungsten doped TiO2 thin
film. Japan Journal of Applied Physics 57:125801.
Biography
Ying Chieh Lee has completed his PhD from Department of Materials Sci-
ence and Engineering, National Chung Hsing University. He is a Professor in
Department of Materials Engineering, National Pingtung University of Sci-
ence and Technology. He has published more than 70 papers in reputed
journals and has been serving as coatings editorial boardmember of repute.
YCLee@mail.npust.edu.twThe characteristics of Ni-Cr-Mn-Y-Cu thin film
resistors
Ying Chieh Lee
and
Hui-Ru Xu
National Pingtung University of Science & Technology, Taiwan
Ying Chieh Lee et al., Nano Res Appl 2018, Volume 4
DOI: 10.21767/2471-9838-C7-027