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Nanobiotechnology 2018
Page 66
Nano Research & Applications
ISSN: 2471-9838
E u r o S c i C o n C o n f e r e n c e o n
Nanotech & Nanobiotechnology
J u l y 1 2 - 1 3 , 2 0 1 8
P a r i s , F r a n c e
P
olydimethylsiloxane (PDMS) has played an important role in chip fabrication owing to its properties such as transparency,
biocompatibility, and good flexibility. However, PDMS is a non-conducting polymer, on which patterning metallic structures
during the fabrication is challenging due to the weak adhesion between metal and PDMS. Hence, the integration of conducting
structures into bulk PDMS was a critical issue. Here, we introduce PDMS-based conducting composites synthesized by mixing
conductive nano/micro-meter-sized particles with PDMS gel, with which the patterning of the conductive structure can be realized
by soft lithographic approach. Experiments show that such composite material can be perfectly constructed into PDMS bulk
material in all cases, thereby greatly enhancing their potential functionalities. By employing above conducting composite for the
fabrication of electrodes, some applications for the on-chip signal control and monitoring becomes feasible, for example, micro
pressure sensor has been designed and fabricated. The micro pressure sensor presented here is a deformable thin conducting
membrane attached on the wall of a microfluidic channel and its line resistance can be tunable under the external pressure
variations. The testing results show that a good linear relationship between line resistance of sensor and applied pressure can be
obtained which is a desired property of pressure sensor.
rtongaa@connect.ust.hkDesign and fabrication of micro-pressure sensor
via conducting nanoparticles
Rui Tong and Weijia Wen
The Hong Kong University of Science and Technology, Hong Kong
Nano Res Appl 2018, Volume 4
DOI: 10.21767/2471-9838-C2-012